Mechanically Flexible Fluid Flow Sensor for Macro-Tubular Architectures

Flow sensors are essential for a variety of applications in fluidic industries. This paper proposes liquid flow sensor using microfluidic channel macrotubular architectures. The comprised firm poly(methyl methacrylate) (PMMA) bridge on mechanically flexible polydimethylsiloxane (PDMS) platform installed the inner wall tubular systems. was compatible with various architectures and adopted curvatures. In addition, microscale surpassed primary disadvantages common bulky rigid flowmeters that cause streams disturbance significant pressure drops Moreover, microchannel is based detecting dominated dynamic generated from fluid velocity inside since tube rate proportional to channel. flowmeter displayed sensitivity 10 pF/kPa were fabricated PDMS platform. particular, measured capacitive owing its compatibility electronics low power consumption. measures flowrate force internal walls Furthermore, behavior studied overall system validated simulation model volume ranging 500 2000 mL/min.